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1 article(s) from Ruhl, Guenther

The integration of graphene into microelectronic devices

Guenther Ruhl,
Sebastian Wittmann,
Matthias Koenig and
Daniel Neumaier

Beilstein J. Nanotechnol. 2017, 8, 1056–1064, doi:10.3762/bjnano.8.107

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Figure 1: Schematic illustration of dry and wet transfer processes. (a) Dry transfer onto shallow depressions...

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Figure 2: Schematic illustration of the basic approach for the method of direct growth of graphene on a SiO₂ ...

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Figure 3: Schematic illustration of the mobility (experiment) as a function of the ratio between C_xH_y size an...

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Figure 4: (a) Schematic showing the layers of material used in fabrication of a back-gated graphene RF-transi...

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Figure 5: Probability of delamination of a high-k dielectric/Ni stack on graphene devices as a function of th...

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Figure 6: Obtained R_c·contact width values as a function of the contact-metal work function (W_F) and increasi...

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Figure 8: (a) Schematic of the final side-contact hole cross-section after a one-step non-selective etch proc...

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Review

Published 15 May 2017

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